Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication

Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.
The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.Content:
Chapter 1 Introduction (pages 1–47):
Chapter 2 What Makes Low?Temperature Plasmas a Versatile Nanotool? (pages 49–106):
Chapter 3 Specific Examples and Practical Framework (pages 107–144):
Chapter 4 Generation of Building and Working Units (pages 145–198):
Chapter 5 Transport, Manipulation and Deposition of Building and Working Units (pages 145–198):
Chapter 6 Surface Science of Plasma?Exposed Surfaces and Self?Organization Processes (pages 249–340):
Chapter 7 Ion?Focusing Nanoscale Objects (pages 341–413):
Chapter 8 Building and Working Units at Work (pages 415–460):
Chapter 9 Conclusions and Outlook (pages 461–481):
Chapter 10 Appendix A. Reactions and Rate Coefficients in Low?Temperature PECVD of Carbon Nanostructures (pages 483–490):
Chapter 11 Appendix B. Why Plasma?based Nanoassembly: Further Reasons (pages 491–498):